MEMS Heater or Emitter Structure for Fast Heating and Cooling Cycles

ABSTRACT

According to various embodiments, a MEMS device includes a substrate, an electrically movable heating element having a first node coupled to a first terminal of a first voltage source and the second node coupled to a reference voltage source, a first anchor anchoring the first node and a second anchor anchoring the second node of the electrically movable heating element to the substrate, and a cavity between the first anchor and the second anchor and between the electrically movable heating element and the substrate.

This application is a divisional of U.S. patent application Ser. No.15/089,027, filed on Apr. 1, 2016, which application is herebyincorporated herein by reference in its entirety.

TECHNICAL FIELD

The present invention relates generally to a system and method of a MEMSdevice, and, in particular embodiments, to a system and method forcontrolling fast heating and cooling of a MEMS structure.

BACKGROUND

Micro-Electro-Mechanical Systems (MEMS), which in general includeminiaturizations of various electrical and mechanical components, areproduced by a variety of materials and manufacturing methods, and areuseful in a wide variety of applications. These applications includeautomotive electronics, medical equipment, and smart portableelectronics such as cell phones, Personal Digital Assistants, (PDA) harddisk drives, computer peripherals, and wireless devices. In theseapplications, MEMS may be used as sensors, actuators, accelerometers,switches, micro-mirrors and many other devices.

MEMS are used for use in temperature sensors to measure temperature orapplications where they need to be heated and emit infra-red light. Insuch applications, MEMS structure may need to respond quickly andaccurately to a heating signal. In some applications, the signal mayrequire a quick cooling after a heating cycle. Various attributes thatmay be taken into design consideration include, for example, thermalresponse, geometry and temperature sensitivity. Joule heating is oftenused in MEMS structure where heat is produced as a result of currentflowing through the structure. Energy is dissipated across theresistance of the structure that results in heat dissipation. In a MEMSstructure, a heating element is often suspended in a cavity to achievethermal isolation. The heating element may also exhibit actuation andemit infra-red light based on the current flow through the heatingelement.

SUMMARY

According to various embodiments, a MEMS device includes a substrate, anelectrically movable heating element having a first node coupled to afirst terminal of a first voltage source and the second node coupled toa reference voltage source, a first anchor anchoring the first node anda second anchor anchoring the second node of the electrically movableheating element to the substrate, and a cavity between the first anchorand the second anchor and between the electrically movable heatingelement and the substrate.

BRIEF DESCRIPTION OF THE DRAWINGS

For a more complete understanding of the present invention, and theadvantages thereof, reference is now made to the following descriptionstaken in conjunction with the accompanying drawings, in which:

FIG. 1A illustrates a top view of a conventional microelectro-mechanical system (MEMS) heating device;

FIG. 1B illustrates a cross-sectional view of the MEMS heating device;

FIG. 2A illustrates a cross-sectional view of an embodiment MEMS heatingdevice during a heating cycle;

FIG. 2B illustrates a cross-sectional view of an embodiment MEMS heatingdevice during a cooling cycle;

FIG. 3 illustrates another embodiment of MEMS heating device controlledby a control circuit;

FIG. 4A illustrates a top view of a MEMS heating device with springsupports for a heating element and a membrane at opposite ends;

FIG. 4B illustrates a top view of a MEMS heating device that includes asensing electrode;

FIG. 5 illustrates a cross-sectional view of another embodiment MEMSheating device with an insulating layer that is formed above a substrateand below a cavity;

FIG. 6A illustrates a cross-sectional view of another embodiment MEMSheating device with the heating element and membrane encapsulated by atensile layer;

FIG. 6B illustrates a cross-sectional view of another embodiment MEMSheating device with the heating element having a tensile layer at thebottom and above the cavity;

FIG. 7 illustrates a cross-sectional view of another embodiment MEMSheating device with Piezo elements above the heating element;

FIG. 8A illustrates a cross-sectional view of another embodiment MEMSheating device with stiction bumps formed in an insulation layer abovethe cavity;

FIG. 8B illustrates an SEM image of stiction bumps shown in FIG. 8A;

FIGS. 9A-9F illustrate a fabrication process flow for the embodimentMEMS heating device of FIG. 2A;

FIGS. 10A-10G illustrate a fabrication process flow for the embodimentMEMS heating device of FIG. 5;

FIGS. 11A-11H illustrate a fabrication process flow for forming stictionbumps in MEMS heating device;

FIG. 12 illustrates an embodiment photoacoustic sensor (PAS) using anembodiment MEMS heating device;

FIGS. 13A and 13B, collectively FIG. 13, illustrate examples ofimplementation of embodiments of the present invention;

FIG. 14 illustrates another example of and implementation of embodimentsof the present invention; and

FIG. 15 illustrates a flow diagram of an embodiment method for forming aMEMS device.

DETAILED DESCRIPTION OF ILLUSTRATIVE EMBODIMENTS

The making and using of various embodiments are discussed in detailbelow. It should be appreciated, however, that the various embodimentsdescribed herein are applicable in a wide variety of specific contexts.The specific embodiments discussed are merely illustrative of specificways to make and use various embodiments, and should not be construed ina limited scope.

The present invention will be described with respect to preferredembodiments in a specific context, namely a system and method forcontrolling a fast heating and cooling of a micro-electrical mechanicalsystem (MEMS) device. Some of the various embodiments described hereininclude MEMS heating elements, MEMS substrate, cavities in MEMSsubstrate and interface circuit. Other embodiments of the presentinvention may also be applied to various systems that utilize heating orcooling by a MEMS device, for example, temperature sensors, infra-redlight emitters, thermal flow sensors, photo-acoustic devices,micro-actuators and many other devices or applications.

As the miniaturization of semi-conductor devices continues, MEMS devicesare getting increasingly popular and finding a wide variety ofapplications in devices, such as heaters, temperature sensors,micro-actuators, photo-acoustic devices, micro-hotplate gas sensors, andthe like. These applications include one or more MEMS heating elementsdesigned to achieve optimum heating and cooling in a controlled manner.The heating can be achieved in different ways, including Joule heating.In some applications, a heating efficiency may be increased by havingthe MEMS heating element placed on a thermally isolated micro-machinedplatform called a membrane, in some cases a carrier plate.

Joule heating is related to a coupling between an electrical and athermal phenomenon in a semiconductor device. Furthermore, Joule heatingin a MEMS device combines electro-thermo-mechanical (ETM) effects,whereby the structure can be actuated based on an electrical potentialacross the device. A conductive layer in a MEMS structure can be heatedquickly by applying an electric potential across the structure andallowing a current flow through the conductive layer. The current flowdissipates power across the resistance of the conductive layer and thetemperature of the conductive layer is increased. In order to retain theheat energy by Joule heating, the MEMS structure generally includes aconductor layer on a membrane or a carrier plate suspended inside anopen cavity. The cavity acts as a thermal insulator. The conductor layermay consist of small mass so that the heating can be fast. The cavityprovides a large thermal resistance or insulation to the substrate,thereby allowing good thermal efficiency during heating.

A large thermal resistance between the heating element and the substrateduring cooling results in slow dissipation of heat and renders thecooling process inefficient. The presence of a cavity aids in rapidheating but obstructs in rapid cooling. MEMS heating element suspendedin a cavity above a substrate during a cooling period may notefficiently dissipate heat for a rapid cooling.

FIG. 1A illustrates a top view of a MEMS structure 100 that includes aheating element 104 of a resistive conductor layer and a membrane 102inside a cavity 106. FIG. 1B shows schematic a cross-section of a MEMSstructure 100, which, to simplify the discussion, does not necessarilycorrespond to any true cross-section of the device (and does notcorrespond to any cross-section of the plan view of FIG. 1A).

The cavity 106 thermally isolates the heating element 104 from asubstrate. A current flow across the heating element 104 gives rise tothe temperature of heating element 104. A smaller mass of heatingelement 104 provides faster rise in the temperature of heating element104 during a heating cycle. The air in cavity 106 acts as a thermalisolator and allows the heat to be retained by heating element 104. Thepresence of a cavity 106 underneath heating element 104 and membrane 102provides large thermal impedance between heating element 104 and thesubstrate. Large thermal impedance thereby allows a rapid heating and anincrease in thermal efficiency.

As shown in FIG. 1B, membrane 102 and heating element 104 are suspendedover cavity 106. Heating element 104 and membrane 102 are supportedabove a substrate 110 with by anchor 108. Anchor 108 can be formed asone continuous structure surrounding the cavity 106 over substrate 110.Cavity 106 is located underneath membrane 102 and above substrate 110.Based on the application, cavity 106 may be filled with air or anygaseous element or a vacuum. Anchor 108 is made of dielectric materialand acts as thermal isolator for membrane 102 and heating element 104from substrate 110.

The MEMS substrate 110 can be formed of materials, for example, silicon,germanium, and gallium arsenide. According to various embodiments, MEMSsubstrate 110 may be doped with p-type or n-type impurities. In anotherembodiment, substrate may be formed of a metal for efficient heattransfer.

Anchor 108 is formed of dielectric material that may include silicondioxide, silicon carbide, silicon nitride, and so forth. An insulatinglayer 118 is built underneath heating element 104 and above anchor 108.Insulating layer 118 is supported by anchor 108 above MEMS substrate 110and a cavity 106. In other embodiments, insulating layer 118 may beformed of a high-strength electric insulator silicon nitride, forexample.

The heating element 104 is implemented by a resistive conductor materialthat may be formed in various ways. In various embodiments, heatingelement 104 may be formed of metals such as platinum and tungsten. Inother embodiments, non-metals such as poly-silicon, silicon carbide,amorphous or single crystal silicon, and the like can be used. A heatspreader can be implemented in the same layer as the heating electrode104 to more effectively and evenly spread heat across membrane 102. Theheat spreader would generally not be electrically connected to theheating element.

In some applications, MEMS structure 100 can be used as a temperaturesensor for a gaseous media, where cavity 106 is filled with the gaseousmedia. The gaseous media prevents rapid heat dissipation by heatingelement 104 due to its poor thermal conduction. When heating element 104is used as a temperature sensor this poor thermal conduction may lead toinaccuracies in the temperature measurements. In an embodiment, an arrayof heating element may be formed in a single substrate to heat a device.In another embodiment, the device to be heated may be placed above thearray of the heating element.

Thermal management is a consideration in designing MEMS devices. Thegeneration of heat via a MEMS device often involves a Joule heatingwhere a voltage is applied to a MEMS heating element of the MEMS deviceand heat is generated due to the flow of an electrical current throughthe MEMS heating element. The Joule heating is defined by Joule's law,the equation is given by:

Q=j ²ρ  (1)

where j is a current density vector having a unit Amp/m2, ρ is aspecific electric resistivity expressed as ohms-m, and Q is a generatedheat per unit volume defined by a unit Watt/m3. The specific electricresistivity ρ is a function of the type, the shape and the structure ofthe material used as the MEMS heating element.

The voltage used for the Joule heating can be pulsed at a specificperiod based on an application. The heating is done when a voltage isapplied across a conductive layer of a heating element and causes acurrent flow. When applying a pulsed voltage to heat a conductive layerof the heating element, the heating follows thermal profile that is afunction of a time constant. The time constant is a function of athermal resistance of the heating element to the substrate or the heatsink. A fast heating can be achieved with a large thermal resistance andwith a fast slew rate of current that is flowing through the heatingelement. Alternatively, a fast cooling can be achieved by a smallthermal resistance to the substrate or the heat sink and a fast slewrate of the current.

In an embodiment of the present invention, a MEMS structure is designedto allow a fast heating by applying a voltage across a MEMS heatingelement and allowing a fast cooling by actuating the MEMS heatingelement to make a contact with a MEMS substrate. An actuation of theMEMS heating element to establish a contact with the MEMS substrate isdone by generating an electrostatic force between the heating elementand the MEMS substrate. Having a surface contact with the MEMSsubstrate, the MEMS heating element achieves very low thermal impedanceto the substrate of the MEMS structure.

Actuation of the MEMS heating element can be described with anelectrostatic force that attracts two oppositely charged elements at aspecific distance. The electrostatic force F is given by the Coulomb'sequation:

$\begin{matrix}{F = \frac{{Q\; 1} \star {Q\; 2}}{d^{2}}} & (2)\end{matrix}$

where k is constant, Q1, Q2 are electric charges and d is the distancebetween the two charged elements. In an embodiment of the presentinvention, a MEMS heater element is charged to a high potential and theMEMS substrate is charged to a ground potential in order to create theelectrostatic force F between them. According to various embodiments,different actuation methods and elements, for example, piezo sensors,thermal expansion can be used to actuate the heating element to make acontact with a MEMS substrate.

FIG. 2A illustrates a cross-sectional view of an embodiment MEMS heater100 during a heating cycle, while FIG. 2B illustrates a cross-sectionalview of the same embodiment MEMS heater 100 during a cooling cycle.

FIGS. 2A and 2B are similar to FIG. 1B but includes additional detailsto illustrate the device in operation. For example, electrical contacts112 and 114 are made to heating element 104 at two opposite ends. Insome embodiments, electrical contacts 112 and 114 may be formed byaluminum, titanium nitride, tungsten etc.

Electrical contact 112 is used for a connection to a high potential of avoltage source and electrical contact 114 is connected to a groundreference during a heating cycle. Another electrical contact 116 is madeto MEMS substrate 110 that remains open during the heating cycle. Duringthe heating cycle, electrical current flows due to a potentialdifference between electrical contacts 112 and 114 via heating element104 and causes a Joule heating. Insulating layer 118 prevents anyelectrical current flow between the heating element 104 and MEMSsubstrate 110 when they are in contact with each other. In thisconfiguration, heating element 104 remains separated, e.g., thermallyinsulated, from MEMS substrate 110 by the cavity 106.

FIG. 2B illustrates a cross-sectional view of the embodiment MEMS heater100 during a cooling cycle. In this configuration, a voltage potentialis created between the heating element 104 and the substrate 110 tocause the heating element 104 and insulating layer 118 to make contactwith MEMS substrate 110 inside the cavity 106.

In switching from the heating cycle, the reference supply connection tothe heating element 104 is removed from electrical contact 114 andelectrical contact 116 is connected to the ground reference. Theelectrical contact 114 can be set to the voltage +V as illustrated orallowed to float. In another configuration, electrical contact 116 isallowed to float while the voltage +V is connected to electrical contact114. In other embodiments, other voltages can be applied to achieve thesame results.

In the example of FIGS. 2A and 2B, an insulating layer 118 preventsheating element 104 from making a direct contact with MEMS substrate110, e.g., to prevent current flow into the substrate and the heatingelement 104 from sticking to the substrate 110. In this example, themovable portion includes heating element 104 and insulating layer 118but not the membrane layer 102 in FIG. 1B. It is understood that theinsulating layer 118 may be the membrane layer or the structure caninclude separate layers. In fact, in certain embodiments, neither layeris needed and the heating element 104 is the only portion deflectedduring operation.

Returning to the operation illustrated in FIG. 2B, a portion of heatingelement 104 and insulating layer 118, which are suspended inside thecavity 106 during heating cycle, are deflected and pulled down to makecontact with MEMS substrate 110. The deflection occurs at both ends ofthe heating element 104 and insulating layer 118. Anchor 108 preventsthe ends of the heating element 104 and insulating layer 118 from beingdeflected. The area of the heating element 104 and insulating layer 118on top of the anchors 108 remains anchored at both ends. The anchor 108is one continuous structure surrounding cavity 106.

FIG. 3 illustrates a cross-section of an embodiment MEMS heater 100 witha control circuit 310 controlling a heating and cooling of heatingelement 104. Control circuit 310 sends electrical signals to heatingelement 104 and MEMS substrate 110 based on a heating and a coolingcycle. In this example, the MEMS device 100 receives a high referencefrom voltage source 316 (e.g., +V), a low reference from voltage source314 (e.g., ground) and a pulsed voltage from pulse generator 312. Thesevoltages are controlled by control circuitry 318, which controlsswitches 320-326.

The pulse generator 312 is controlled by switch 324 to be coupled toelectrical contact 112 during the heating cycle. While not implementedin this particular circuit, the pulse generator 312 can be coupled toelectrical contact 112 and/or electrical contacts 114 during a coolingcycle. The period is designed based on the application. In anembodiment, the frequency of the pulse generator is between 5 to 10 Hz.In other other embodiments, the frequency can be lower or higher. Forexample, the frequency could be in the hundreds of Hertz.

In the illustrated example, the ground reference voltage 314 iscontrolled by control switch 320 to be coupled to electrical contact 114during a heating cycle and is controlled by switch 322 to be coupled toelectrical contact 116 during a cooling cycle. Likewise, the highreference voltage 316 is controlled by switch 326 to be coupled toelectrical contact 112 during a heating cycle and a cooling cycle.

It should be noted that while one configuration of control circuit 310is illustrated, those skilled in the art may recognize that controlcircuit 310 can be implemented in various different ways. In anembodiment, control circuit 310 can be formed in the same MEMSsubstrate. In another embodiment, control circuit 310 can be a part ofanother integrated circuit (IC). In various embodiments, an array ofheating elements 104 may be controlled by a single control circuit 310.In another embodiment, each heating element may have their own controlcircuit 310 to allow an independent control of heating element 104during a heating and a cooling operation.

FIGS. 4A and 4B illustrate other embodiments. Referring to FIG. 4A, aMEMS heater 400 includes a heating element 104 having spring supports404 at opposite ends of the MEMS structure. Each spring support 404 hasa spring anchor 410 that is located on top of anchor 108. MEMS heater400 also includes a membrane 102 formed under the heating element 104that carries and provides support to heating element 104 while suspendedin a cavity above a MEMS substrate. Spring supports 404 are electricallyconnected to heating element 104 and spring supports 408 areelectrically connected to membrane 102 at two opposite ends. Each springsupport 408 includes a spring anchor 412 that is placed on top of anchor108 above MEMS substrate 110 to suspend heating element 104 and membrane102 above the MEMS substrate and inside the cavity.

Membrane 102 is formed in a rectangular shape and heating element 104 isformed in a serpentine shape to allow smaller heating mass. A smallermass provides a faster heating with smaller voltage across the heatingelement. However, in another embodiment, the heating element 104 can beformed in a rectangular shape or any other shape supported by membrane102. Spring supports at both ends of membrane 102 and heating element104 allow reduced actuation voltage and larger surface contact to thesubstrate during heat transfer in a cooling cycle.

FIG. 4B illustrates an embodiment that includes a second serpentinestructure 105. This second structure 105 can be an electrode that isused for temperature sensing. As illustrated, the sensing structure 105can be electrically connected to control circuitry (e.g., controlcircuit 310 of FIG. 3) using the two other anchors. Results of thesensing can be used to control the heating and cooling of the sensingheating element 104.

Other embodiments and variations are also envisioned. For example, forceand sense electrodes can be used to eliminate parasitic contactresistances. It is understood that various ones of the embodiments andvariations described herein can be used in combination.

FIG. 5 illustrates a cross-section of an embodiment MEMS heater 500 thatincludes an electrical insulating layer 118 formed over MEMS substrate110 instead of being attached to heating element 104 as shown in theembodiment of FIG. 2A. Forming electrical insulating layer 118 on MEMSsubstrate 110 rather than the membrane 102 eliminates mechanicalinfluences that may have been exerted by electrical insulating layer 118on membrane 102 during actuation in the previously described embodimentsince electrical insulating layer 118 is not subjected to any actuation.The MEMS substrate 110 remains electrically isolated from the membrane102 during cooling cycle. In another embodiment, an insulator 118 aspreviously described can be formed below the membrane 102, e.g., asshown in FIG. 2A.

FIGS. 6A and 6B illustrate another embodiment of MEMS heater 600 and 620in which the heating element 104 is encapsulated by a coating of atensile layer 602. Membrane 102 and heating element 104 can be coated onupper and or lower surfaces by a tensile layer 602. Tensile layer 602provides flexibility of heating element 104 during actuation andfacilitates contact of heating element 104 to MEMS substrate 110 duringa cooling cycle. An electrical isolation from the substrate 110 byheating element 104 is also achieved by tensile layer 602 while incontact during the cooling cycle. FIG. 6A illustrates an example wherethe tensile layer 602 is formed on both top and bottom surfaces of thecombination of membrane 102 and heating element 104 while FIG. 6Billustrates another embodiment of MEMS heater 620 that includes coatingof a single tensile layer 602 at the bottom of the combination ofmembrane 102 and heating element 104. Coating can be made with differenttypes of tensile layers. In an embodiment of the present invention, thetensile layer 602 may be formed with a layer of silicon nitride.

FIG. 7 illustrates another embodiment of MEMS heater 700 that includes apiezo device 702 formed at two ends of heating element 104. Piezo 702 ateach end of heating element 104 clamps heating element 104 during anexpansion. During expansion of piezos 702, downward bending moments, asillustrated by the arrows 706, are created on heating element 104 thatcause heating element 104 to actuate downwards and make contact to MEMSsubstrate 110. Heating element 104 actuates upwards when piezos 702 atboth ends contract. Thus, by expanding piezos 702, heating element 104can be actuated downwards to make contact with MEMS substrate 110 toachieve rapid heat dissipation.

On the other hand, with a contraction of piezos 702, heating element 104can be pulled away from MEMS substrate 110 to create a thermal isolationin cavity 106, to prevent heat energy loss during heating cycle. Themembrane 102 is formed below heating element 104 to carry heatingelement 104. The actuation of heating element 104 causes membrane 102 tofollow the actuation towards substrate 110. Alternatively, membrane 102is actuated upwards and away from substrate 110 during contraction ofpiezos. In an embodiment of the present invention, a piezo may be formedby a thin film piezoelectric and structural materials above heatingelement 104.

FIG. 8A illustrates a cross-section view of an embodiment MEMS heater800 that includes anti-stiction bumps 802 formed in an insulating layer118. Anti-stiction bumps are small protrusions of isolation layer, e.g.,with spiky tips, that prevent stiction of insulating layer 118 to MEMSsubstrate 110. A smooth surface of insulating layer 118 can remainattached to a smooth surface of MEMS substrate during the cooling cycleand may need additional force to be removed after the cooling cycle, beisolated from MEMS substrate. Anti-stiction bumps 802 with their spikytips prevent stiction and allow insulating layer 118 and heating element104 easy separation during operation.

FIG. 8B illustrates a scanning electron microscope (SEM) image of aninsulating layer 118 with anti-stiction bumps 802. Anti-stiction bumpsare created by using an additional mask that is used to create smallsquares or round holes etched in a sacrificial layer filling the cavity.Insulating layer 118 fills up these holes when insulating layer isdeposited on top of the sacrificial layer. Once the resistive conductorlayer forming heating element 104 is deposited, the sacrificial layer isremoved; however, protruding structures in insulating layer filling upthe squares or holes remain and create anti-stiction bumps 802 insidecavity 106. Tips of anti-stiction bumps can be made spiky byoverexposing the sacrificial layer.

In another embodiment, stiction can be prevented by the heater itself.In particular, the heater temperature can prevent from stiction as thewater responsible for sticion gets vaporized. This is another example ofa mechanism to prevent stiction.

FIGS. 9A-9G illustrate an embodiment fabrication process flow for theembodiment MEMS device 100. As will be discussed below, simple surfacemicro mechanical processes with TEOS oxide and poly-crystalline siliconare used to form sacrificial layers as described above. Alternatives arepossible, such as those explicitly mentioned and others that would beclear to one of ordinary skill.

According to various embodiments, FIG. 9A begins with a wafer 900 thatincludes a substrate 110 and a dielectric layer 904 formed oversubstrate 110. In alternative embodiments, substrate 110 may be formedof silicon or other materials such as silicon germanium, siliconcarbide, gallium arsenide, or the like. Substrate 110 may be asilicon-on-insulator (SOI) substrate. SOI substrate may include a layerof semiconductor material (e.g., silicon germanium, gallium arsenide,and the like) formed over an insulator layer (e.g., buried oxide), whichis formed in a silicon substrate. Alternatively, other substrates thatcan be used include multi-layered substrates, gradient substrates,hybrid orientation substrates, and so forth.

Dielectric layer 904 is formed of a dielectric material, such as silicondioxide (SiO2). Dielectric layer 904 formed by silicon dioxide acts as astrong thermal and electrical insulator. Dielectric layer 904 may bedeposited over substrate 110 using, for example, spinning, chemicalvapor disposition (CVD), plasma enhanced chemical vapor deposition(PECVD), low pressure CVD, or other suitable deposition techniques. Inother embodiments, dielectric layer 904 may be formed of differentsuitable materials such as low-k dielectrics (e.g., carbon dopedoxides), extremely low-k dielectrics (e.g., porous carbon doped silicondioxide), a polymer (e.g., polyimide), combinations thereof, or thelike. A portion of dielectric layer 904 may be removed in subsequentprocess steps in order to form an anchor or base for MEMS structures tosubstrate 110.

FIG. 9B illustrates a patterned dielectric layer 904 forming the anchoror a base 108 to support a MEMS structure above substrate 110. Thepatterning of dielectric layer 904 can be done using, for example, acombination of photolithography and etching techniques. Patterning ofdielectric layer above substrate 110 may be performed by depositing aphotoresist above dielectric layer 904. Liquid photoresist is placed ondielectric layer 904 across the wafer 900. Wafer 900 is spun at highspeed to produce a thin and uniform coating of the photoresist. Thephotoresist is then exposed to selectively etch out a portion ofdielectric layer 904 that forms a cavity above substrate 110. Differentetching techniques may be used, for example, reactive ion etching (RIE),lateral etching, and the like, to remove the portion of dielectric layer904.

FIG. 9C illustrates the formation of a sacrificial layer 906 acrosswafer 900 that fills the cavity patterned and etched as described in theprevious paragraph. Sacrificial layer 906 is chosen such that anchor 108is not damaged during a removal of sacrificial layer 906 in thesubsequent process. Various design requirements of MEMS structures areachieved by sacrificial layer 906 during the processing. Sacrificiallayer 906 does not constitute any part of the final MEMS structure, andhence called a sacrificial layer. Suitable mechanical properties ofsacrificial layer 906 may include, for example, good adhesion, lowresidual stresses to avoid delamination or cracking of the MEMSstructure.

FIG. 9D illustrates a deposition of a sacrificial layer 906 abovesacrificial layer 906. Sacrificial layer 906 may be formed by a siliconnitride (Si3N4) layer that has high-strength electric insulationproperty. Different types of deposition techniques used to deposit thesilicon nitride over sacrificial layer 906 include, for example, achemical vapor deposition (CVD), low pressure chemical vapor deposition(LPCVD), a plasma-enhanced chemical vapor deposition (PECVD), andothers. In an embodiment, insulating layer is deposited with a thicknessof 1400 Å.

After deposition of sacrificial layer 906, a resistive conductor layer104 is deposited as shown in FIG. 9E. Different types of material can beused for resistive conductor layer 104 that include, for example, polysilicon, silicon carbide, amorphous or single crystal silicon, and soforth. The deposition of resistive conductor layer 104 may be performedby a LPCVD or PECVD process. In an embodiment, resistive conductor layer104 may be deposited with a thickness of 2800 Å. In an embodimentmanufacturing process, resistive conductor layer 104 may go through ahigh temperature processing steps after deposition that may include, forexample, doping, thermal oxidation, annealing, and so forth. Resistiveconductor layer 104 may have different sheet resistance based on theapplication. A resistivity of resistive conductor layer 104 may becontrolled by a phosphorous doping using, for example, an ionimplantation process. However, other method, for example, diffusion maybe used to control the resistivity of resistive conductor layer 104. Inan embodiment, resistive conductor layer 104 has a sheet resistivity of100 Ohm/square. In another embodiment, a thickness of the sacrificiallayer 906 may be between 0.1 and 0.5 of a thickness of resistiveconductor layer 104.

FIG. 9F illustrates a patterning process on resistive conductor layer104. The patterning is performed, for example, using a combination ofphotolithography and etching. According to an embodiment, resistiveconductor layer 104 is patterned in a rectangular shaped heatingelement. In an embodiment, patterning of resistive conductor layer 104is done to create a serpentine heating element for a MEMS device. Inanother embodiment, patterning of resistive conductor layer is done toform a spring support at both ends of the serpentine heating element.Various shapes may be patterned for manufacturing the heating elementbased on the application.

Various modifications to the embodiment fabrication sequence describedin FIGS. 9A-9F are envisioned. Further, the structure may be modified innumerous embodiments and modifications to the fabrication sequence willbe expected. The various process steps described herein and theaccompanying figures are illustrative. According to various embodiments,structures may include sloped sidewalls, rough surfaces, and numerousdimensions. Fabrication method may also be used as disclosed in U.S.patent application publication US 2015/0102372 A1 titled “SemiconductorDevice for Emitting Frequency-Adjusted Infrared Light” filed Oct. 14,2013, which is incorporated herein by reference in its entirety.

FIGS. 10A-10G illustrate an embodiment manufacturing process flow forthe embodiment MEMS device of FIG. 5. The process begins with substrate110 of a wafer 1000 as shown in FIG. 10A. According to variousembodiments, substrate 110 may be formed of silicon or other materials.In another embodiment, substrate 110 may be lightly doped with p-typematerial, for example.

FIG. 10B illustrates a deposition of a thin insulating layer 118 abovesubstrate 110. Thin insulating layer may be formed by a silicon nitridelayer having a high-strength electrical insulation property. Variousdeposition techniques may be used to deposit insulating layer 118, forexample, CVD, PECVD, LPCVD and other suitable deposition techniques.Thickness of thin insulating layer may vary based on different MEMSstructures. In embodiments of the present invention, thin insulatinglayer 118 is deposited for a thickness of about 140 to 280 nm. Thesethicknesses can be larger or smaller in other applications.

A dielectric layer 904 is formed by depositing a dielectric material,such as SiO₂ above thin insulating layer 118 as shown in FIG. 10C. Thedeposition may be done using various methods, for example, spinning CVD,PECVD, or other suitable deposition techniques. FIG. 10D illustrates apatterning of dielectric layer 904 to form the anchor or base 108 tosupport MEMS device above substrate 110 and sacrificial layer 906. Thepatterning of dielectric layer may be used to define a cavity 106 forthe MEMS device shown in FIG. 5. The cavity is surrounded by anchor 108.

FIG. 10E illustrates deposition of a sacrificial layer 906 that fills upthe cavity surrounded by anchor 108. Sacrificial layer 906 acts as atemporary mechanical layer onto which actual device layers, for example,poly-silicon for heating element, silicon nitride for membrane, andothers can be deposited. FIG. 10F illustrates deposition of a resistiveconductor layer 104 deposited above sacrificial layer 906. Resistiveconductor layer 104 may be formed by different materials, for example,poly silicon, silicon carbide, and so forth.

Patterning of resistive conductor layer 104 may be performed with acombination of photolithography and etching process. A negative or apositive photoresist may be applied to resistive conductor layer 104 topattern an embodiment MEMS heating element.

After patterning resistive conductor layer 104, sacrificial layer 906 isremoved and cavity 106 is formed. The heating element remains suspendedabove the cavity and anchored at two ends as shown in FIG. 10G.

FIGS. 11A-11H illustrate an embodiment manufacturing process to formstiction bumps in insulating layer 118. FIG. 11A illustrates the stepwhere sacrificial layer 906 is formed to cover a cavity inside anchor108 and above substrate 110. A layer of photoresist 1102 is depositedover sacrificial layer 906 as illustrated in FIG. 11B. Photoresist 1102is an organic polymer which changes its chemical structure when exposedto ultraviolet (UV) light. A deposition of photoresist 1102 may be donein various methods; one of these methods includes spin coating.Photoresist 1102 is then exposed with UV light to pattern stiction bumpregions on sacrificial layer 906. FIG. 11C shows unexposed area 1104 ofphotoresist 1102. These unexposed area 1104 in photoresist 1102 arewashed away to perform selective etching of sacrificial layer 906 toform stiction bumps.

FIG. 11D shows such a process step where photoresist 1102 containsunexposed area 1104 to prepare for etching of sacrificial layer 906.FIG. 11E illustrates etching of sacrificial layer 906 to create stictionbumps 1106. Etching of sacrificial layer 906 may be done in variousways, an isotropic etching, anisotropic etching, wet or dry etching,plasma etching, for example. FIG. 11F illustrates the process step wherephotoresist 1102 is removed and sacrificial layer 906 contains groovesfor stiction bumps 1106. Removal of photoresist may be done usingvarious types of solvents.

FIG. 11G illustrates the process step where sacrificial layer 906 isdeposited over sacrificial layer 906 having the grooves for stictionbumps 1106. Sacrificial layer 906 fills up these grooves and stictionbump 1106 are created underneath sacrificial layer 906. FIG. 11Hillustrates the protruding structures of stiction bump 1106 inside thecavity when sacrificial layer 906 is removed underneath insulating layer118 and resistive conductor layer 104. FIGS. 11A-11H illustrate onemethod of forming stiction bumps. It should be appreciated that variousother methods may be used to form stiction bumps in an insulating layer118 of a MEMS heating device.

The device described here can be used in a number of applications. Inone example, a photoacoustic gas sensor (PAS) device includes anembodiment MEMS heating element used as an emitter of light source whenheated to a specific temperature. FIG. 12 illustrates such an embodimentPAS device 1200 that includes an emitter module 1202, an optical path1204, an infra-red (IR) filter 1206 and a detector or a pressuresensitive module 1208. Emitter 1202 may be formed by resistive conductorlayer suspended above a cavity and a substrate. Optical path 1204 may beformed by a volume that may be filled with a gaseous media that is beinganalyzed. IR filter 1206 may be formed by different layers, for example,metal, monocrystalline silicon or poly silicon. In various embodiments,IR filter 1206 may be formed in the same substrate as emitter 1202separated by a distance. Different types of detectors may be used aspressure sensitive module 1208, for example, a microphone to convert theacoustic waves to electric signals. In another embodiment, aphoto-detector may be used where incoming light signals may be measured.In another embodiment, emitter module 1202 and pressure sensitive module1208 may be implemented on different silicon substrate. In anotherembodiment, a loudspeaker may be designed by having audible signalsgenerated by emitter module 1202 generated based on excitations.

FIG. 12 also illustrates excitations 1210 and 1212 generated by emittermodule 1202 that represent different wavelengths. Excitations 1210represent a specific wavelength that is excited by the gaseous mediaused to be analyzed. Excitations 1212 represent all other wavelengthsexcept the wavelength of excitations 1210. Gaseous media in optical path1204 absorbs and reduces energy for excitations 1210 as shown by theoutput excitations of optical path 1204. These excitations propagate asacoustic waves through IR filter 1206 that is filled with a referencegas.

IR filter 1206 acts as a band pass filter and allows the excitations1210 to pass through. Excitations 1212 are filtered by IR filter 1206and do not pass through IR filter 1206. The acoustic waves caused by theemitter pulses generated by the emitter module interacting with the gasto be analyzed propagate to detector or pressure sensitive module 1208.Pressure sensitive module 1208 is used to detect a pressure variation ofthe incoming waves. Information contained in the electric signalsgenerated by pressure sensitive module 1208 is further used fordetermining composition of the gas. In an embodiment, pressure sensitivemodule 1208 may be implemented with a speaker.

Two specific examples will now be described with respect to FIGS. 13 and14. FIG. 13 is taken from FIG. 2 of co-pending application Ser. No.14/052,959 (published as “Photoacoustic Gas Sensor Device and A Methodfor Analyzing Gas”) and FIG. 14 is taken from FIG. 4 of co-pendingapplication Ser. No. 14/052,962 (published as “Semiconductor Device forEmitting Frequency Adjusted Infrared Light”) both of which areincorporated here by reference. The numbers in FIGS. 13A, 13B and 14 areleft as published in their specifications and applications.

In the examples of FIGS. 13A and 13B, the emitter module (referred to as120 in the above mentioned reference) can be implemented using a MEMSheating structure 104 described herein. In FIGS. 13A and 13B the emittermodule is implemented by heating element 104 and thus referred asemitter module 104 in the description below. FIG. 13A illustrates aschematic illustration of a photoacoustic gas sensor device 1300 foranalyzing gas according to an embodiment. The photoacoustic gas sensordevice 1300 comprises an emitter module 104 and a pressure sensitivemodule 1330 arranged on a common substrate 110. The emitter module 104is able to or configured to emit light pulses 122. The pressuresensitive module 1330 is arranged within a reference gas volume 106B.The reference gas volume 106B is separated from a volume 106A intendedto be filled with a gas to be analyzed. The pressure sensitive module1330 generates a sensor signal 132 indicating information on an acousticwave 124 caused by light pulses 122 emitted by the emitter module 104interacting with a reference gas within the reference gas volume 106B.

FIG. 13B illustrates a cross-section of a photoacoustic gas sensordevice 1300 of according to an embodiment. Photoacoustic gas sensordevice 1300 includes emitter module 104, pressure sensitive module 1330,and an analyzing module 1340 that are arranged on the same side of acommon substrate 110. Emitter module 104 emits light pulses 122 throughthe hole or window 1322 into the volume 106A intended to be filled withthe gas to be analyzed. The part of reference gas volume 106B locatedopposite to pressure sensitive module 1330 is enclosed by a housing 1309neighboring the housing 1303 of volume 106A. Common substrate 110comprises a hole 1306 between the pressure sensitive module 1330 andreference gas volume 106B. A lid or housing 1350 covers the pressuresensitive module 1330 and an analyzing module 1340. The analyzing module1340 is laterally arranged between pressure sensitive module 1330 andemitter module 104. Emitter module 104 and analyzing module 1340 isoptionally protected by a casting compound 1360. The reference gasvolume 106B is enclosed by the housing 1303 comprising a gas outlet 1305and a gas inlet 1307. The carrier substrate 110 may comprise one or moreelectrical contacts 1314. An electrical grounding contact 1312 may beused to contact shielding lid 1350 to common substrate 110.

In the example of FIG. 14, the lateral emitter structure 1410 can beimplemented by an embodiment heating element 104 as described herein.FIG. 14 illustrates a schematic cross-section of a semiconductor device1400 for emitting frequency-adjusted infrared light according to anembodiment. Visible light will also be emitted (Black/Gray bodyradiation according to Planck's law).

The semiconductor device 1400 comprises a semiconductor substrate 110and a lateral emitter structure 1410 (e.g. IR-emitter element) arrangedwithin a metal layer (e.g. copper, aluminum, tungsten, titan or titannitride) or a semiconductor layer (e.g. monocrystalline silicon or polysilicon) separated from the semiconductor substrate 110 by a cavity 106.The lateral emitter structure 1410 comprises edge regions 1412surrounding the part of lateral emitter structure 1410 mainly (more than50% of the light intensity) contributing to the emitted infrared lightlaterally extending into insulating material (e.g. silicon dioxide)formed by insulating layers, for example. The lateral emitter structure1410 is electrically connected at opposite sides with the edge region1412 by electrical contacts 1402 (e.g. vias, filament contact) to beconnected to an external current source or connected to an emittercontrol module on the same semiconductor die. The lateral filterstructure 1404 (e.g. photonic crystal filter) is located above thelateral emitter structure 1410 by the lateral air gap 1430.

FIG. 15 illustrates a flowchart of a method 1500 for manufacturing aMEMS heating device according to an embodiment. The method 1500 beginsat step 1502 that includes forming a dielectric layer over a substrate.In step 1504, the dielectric layer is patterned to form a first anchorand a second anchor. The first and the second anchors are separated by acavity above the substrate. In step 1506, a sacrificial layer is formedin the cavity so that actual mems device can be deposited. In step, 1508an insulating layer is deposited over the sacrificial layer. In anembodiment, a thickness of the insulating layer is between 0.1 to 0.5 ofa thickness of the layer of the heating element. In step 1510, aresistive conductor layer to form the heating element is deposited abovethe insulating layer. In step 1512, the resistive conductor layer ispatterned to form the heating element. The heating element can be madeof many different shapes, for example, in a shape of a rectangle or aserpentine. In step 1514, the sacrificial layer is removed underneaththe insulating layer to form the actual cavity over which the heatingelement is suspended.

According to some embodiments described herein, advantages may includeadding functionality to an integrated product. Some embodiments mayinclude a heating element and control circuits integrated in a samesemiconductor die. Such embodiments may advantageously include no extramasks or only a single extra mask during the fabrication sequence.Another advantage of some embodiments may include integrated temperaturesensing functionality. Integration in a single semiconductor may alsoadvantageously lead to improved performance and decreased cost in someembodiments. A further advantage of some embodiments may includeproviding heating for a subject that may be placed in contact with theheating element or a small distance apart in a single package. Suchembodiments may advantageously improve heating performance, increasethermal efficiency, and the like

As discussed above, the present invention includes a number ofembodiments. It is noted that various aspects of the embodiments can becombined. In one embodiment, a method is used for operating a MEMSelement that comprises a movable heater element overlying a substrate.The method comprises heating the movable heater element by causing acurrent to flow through the movable heater element while the movableheater element is spaced from the substrate; and cooling the movableheater element by causing the movable heater element to physicallycontact while being electrically isolated from the substrate.

Implementations may include one or more of the following features.Cooling the movable heater element can be accomplished by causing avoltage difference between the movable heater element and the substrateand discontinuing the current flow through the movable heater element.Cooling the movable heater element can be accomplished by generating anelectro-static force between the substrate and the heater element byconnecting the substrate to a different potential than the movableheater element. Cooling the movable heater element can be accomplishedby generating an actuation force on the heater element by an expansionof a first piezo and a second piezo, where the first piezo is located ona first end of the heating element and a second piezo is located on asecond end of the heating element. Heating the movable heater elementcan be accomplished by generating light by the movable heater element.

In another embodiment, a method is used for forming a microelectro-mechanical system (MEMS) heater element. The method comprisesforming a dielectric layer over a substrate; patterning the dielectriclayer to form a cavity within the dielectric layer; forming asacrificial layer in the cavity; depositing an insulating layer over thesacrificial layer; depositing a resistive conductor layer over theinsulating layer; patterning the resistive conductor layer to form aheater element that overlies the cavity and extends to two regions ofthe dielectric layer; and removing the sacrificial layer from the cavityso that a portion of the heater element is spaced from the substrate.

Implementations may include one or more of the following features. Themethod could also comprise forming a first contact at a first end of theresistive conductor layer and a second contact at a second end of theresistive conductor layer. The method could also comprise depositing asecond insulating layer over the resistive conductor layer toencapsulate the heater element. A thickness of the second insulatorlayer can be between 0.1 and 0.5 of a thickness of the heater element.The insulator and the second insulator can comprise silicon nitride. Theinsulator and the second insulator can comprise a material with hightensile strength. The method could also comprise forming an array ofstiction bumps at a surface of the insulator layer.

In another embodiment, a MEMS device comprises: a substrate; anelectrically movable heating element having a first node and a secondnode, where the first node is coupled to a first terminal of a firstvoltage source and the second node is coupled to a reference voltagesource; a first anchor anchoring the first node and a second anchoranchoring the second node of the electrically movable heating element tothe substrate; and a cavity between the first and the second anchors andbetween the electrically movable heating element and the substrate.

Implementations may include one or more of the following features. Thefirst voltage source can be configured to provide a first voltage to thefirst node of the electrically movable heating element. The electricallymovable heating element can be configured to be cooled down by havingthe second node of the electrically movable heating element removed fromthe reference voltage source and creating an equipotential surfaceacross the electrically movable heating element. The substrate can beconnected to the reference voltage source so that an electrostatic forcecan be made between the electrically movable heating element and thesubstrate to actuate the electrically movable heating element to makecontact to the substrate.

The electrically movable heating element can be encapsulated withsilicon nitride. An array of electrically movable heating elements canbe arranged above the substrate, where the electrically movable heatingelements in the array can be controlled in a group. The electricallymovable heating elements in the array can be controlled separately by anarray of first voltage sources.

The MEMS device can further comprise a control circuit configured toprovide a current through the movable heating element during a heatingperiod and causing an infra-red light emission. The MEMS device canfurther comprise a spring support coupling the heating element to thefirst and second anchors. The MEMS device can further comprise amembrane, the heating element comprising a serpentine structureoverlying the membrane, the spring structure being formed between themembrane and the first and second anchors.

In another embodiment, a MEMS device comprises a region of material witha cavity formed therein; an movable membrane anchored to the region ofmaterial and overlying the cavity, the movable membrane comprising anelectrically movable heating element; a first piezo material physicallyattached the movable membrane at a first portion of the region ofmaterial; and a second piezo material physically attached the movablemembrane at a second portion of the region of material. The first andsecond piezo materials are configured to cause the membrane to movebetween a first position at a top of the cavity to a second positionwithin the cavity.

Implementations may include one or more of the following features. Theheating element can comprise a serpentine structure overlying themembrane. The MEMS device can further comprise a heat spreader structureformed in the same layer as the heating element, the heat spreaderstructure being electrically insulated from the heating element.

While this invention has been described with reference to illustrativeembodiments, this description is not intended to be construed in alimiting sense. Various modifications and combinations of theillustrative embodiments, as well as other embodiments of the invention,will be apparent to persons skilled in the art upon reference to thedescription. It is therefore intended that the appended claims encompassany such modifications or embodiments.

What is claimed is:
 1. A method for forming a micro electro-mechanicalsystem (MEMS) heater element, the method comprising: forming adielectric layer over a substrate; patterning the dielectric layer toform a cavity within the dielectric layer; forming a sacrificial layerin the cavity; depositing a first insulating layer over the sacrificiallayer; depositing a resistive conductor layer over the first insulatinglayer; patterning the resistive conductor layer to form a heater elementthat overlies the cavity and extends to two regions of the dielectriclayer; and removing the sacrificial layer from the cavity so that aportion of the heater element is spaced from the substrate.
 2. Themethod of claim 1, further comprising forming a first contact at a firstend of the resistive conductor layer and a second contact at a secondend of the resistive conductor layer.
 3. The method of claim 1, furthercomprising depositing a second insulating layer over the resistiveconductor layer to encapsulate the heater element.
 4. The method ofclaim 3, wherein a thickness of the second insulator layer is between0.1 and 0.5 of a thickness of the heater element.
 5. The method of claim3, wherein the first insulating layer and the second insulating layercomprise silicon nitride.
 6. The method of claim 5, wherein the firstinsulating layer and the second insulating layer comprise a materialwith high tensile strength.
 7. The method of claim 1, further comprisingforming an array of stiction bumps at a surface of the first insulatinglayer.
 8. The method of claim 1, wherein the heater element isconfigured to be heated by causing a current to flow through the heaterelement when the the portion of the heater element is spaced from thesubstrate.
 9. The method of claim 8, wherein the heater element isfurther configured to be cooled by causing the portion of the heaterelement to contact the substrate while being electrically isolated fromthe substrate.
 10. A micro electro-mechanical system (MEMS) devicecomprising: a substrate; a dielectric layer disposed over the substrate;a cavity formed in the dielectric layer; and a heater element overlyingthe cavity and extending to two regions of the dielectric layer, theheater element comprising a first insulating layer and a resistiveconductive layer disposed over the first insulating layer.
 11. The MEMSdevice of claim 10, further wherein the heater element further comprisesa second insulating layer disposed over the resistive conductive layerto encapsulate the heater element.
 12. The MEMS device of claim 11,wherein wherein a thickness of the second insulator layer is between 0.1and 0.5 of a thickness of the heater element.
 13. The MEMS device ofclaim 11, the first insulator layer and the second insulator layercomprise silicon nitride.
 14. The MEMS device of claim 13, wherein thefirst insulator layer and the second insulator layer comprise a materielwith high tensile strength.
 15. The MEMS device of claim 10, furthercomprising an array of stiction bumps disposed at a surface of the firstinsulator layer.
 16. The MEMS device of claim 10, wherein the heaterelement spaced from the substrate is configured to be heated by causinga current to flow through the heater element when a portion of theheater element overlies the cavity and is spaced from the substrate. 17.The MEMS device of claim 16, wherein the heater element is furtherconfigured to be cooled by causing the portion of the heater elementcontacts the substrate while being electrically isolated from thesubstrate.
 18. A method for forming a micro electro-mechanical system(MEMS) heater element, the method comprising: forming a cavity with aregion of material; forming a movable membrane anchored to the region ofmaterial and overlying the cavity, the movable membrane including anelectrically movable heating element; forming a first piezo materialphysically attached the movable membrane at a first portion of theregion of material; and forming a second piezo material physicallyattached the movable membrane at a second portion of the region ofmaterial, wherein the first and second piezo materials are configured tocause the movable membrane to move between a first position at a top ofthe cavity to a second position within the cavity.
 19. The method ofclaim 18, wherein the heating element comprises a serpentine structureoverlying the membrane.
 20. The method of claim 18, further comprisingforming a heat spreader structure in the same layer as the heatingelement, the heat spreader structure being electrically insulated fromthe heating element.